SYSTEM AND METHOD FOR FAULT ISOLATION BY EMISSION SPECTRA ANALYSIS

摘要

An apparatus and method for optical probing of a DUT is disclosed. The system enables identifying, localizing and classifying faulty devices within the DUT. A selected area of the DUT is imaged while the DUT is receiving test signals, which may be static or dynamic, i.e., causing certain of the active devices to modulate. Light from the DUT is collected and is passed through a rotatable diffracting element prior to imaging it by a sensor and converting it into an electrical signal. The resulting image changes depending on the rotational positioning of the grating. The diffracted image is inspected to identify, localize and classify faulty devices within the DUT.

主权项

1. A method for probing an integrated circuit, comprising:
collecting light emitted from a selected area of an integrated circuit; passing the light through a diffracting element to obtain diffraction spectrum; projecting the diffraction spectrum on a photosensor to obtain an image of the diffraction spectrum; displaying the image of the diffraction spectrum on a monitor; and, classifying a faulty device in the integrated circuit according to a shape of the image of the diffraction spectrum displayed on the monitor.