CROSS-SECTION PROCESSING AND OBSERVATION METHOD AND CROSS-SECTION PROCESSING AND OBSERVATION APPARATUS

摘要

A cross-section processing and observation method performed by a cross-section processing and observation apparatus comprises a cross-section processing step of forming a cross-section by irradiating a sample with an ion beam; a cross-section observation step of obtaining an observation image of the cross-section by irradiating the cross-section with an electron beam; and repeating the cross-section processing step and the cross-section observation step so as to obtain observation images of a plurality of cross-sections. In a case where Energy Dispersive X-ray Spectrometry (EDS) measurement of the cross-section is performed and an X-ray of a specified material or of a non-specified material that is different from a pre-specified material is detected, an irradiation condition of the ion beam is changed so as to obtain observation images of a plurality of cross-sections of the specified material, and the cross-section processing and observation of the specified material is performed.

主权项

1. A cross-section processing and observation apparatus comprising:
a sample stage configured to place a sample thereon; an ion beam column configured to irradiate the sample with an ion beam; an electron beam column configured to irradiate the sample with an electron beam; a secondary electron detector configured to detect secondary electrons generated from the sample; an Energy Dispersive X-ray Spectrometry (EDS) detector configured to detect an X-ray generated from the sample; and a control unit configured to automatically change an irradiation condition of the ion beam in a case where an X-ray of a specified material or a non-specified material that is different from a pre-specified material is detected by the EDS detector during a cross-section processing and observation process, the cross-section processing and observation process including:
a cross-section processing step of forming a cross-section by irradiating the sample with the ion beam,a cross-section observation step of obtaining an observation image of the cross-section based on the secondary electrons or the X-ray generated from the cross-section by irradiating the cross-section with the electron beam; andrepeating the cross-section processing step and the cross-section observation step so as to obtain observation images of the plurality of cross-sections formed substantially parallel with each other at predetermined intervals.