| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric vibrating reed having a multilevel mesa structure which can reduce a CI value.SOLUTION: The piezoelectric vibrating reed includes: a piezoelectric substrate 10 comprising an AT-cut quartz substrate and having a thickness direction parallel to a Y' axis; and excitation electrodes 20 arranged in obverse-reverse opposition in vibrating regions on both principal surfaces of the piezoelectric substrate 10. The piezoelectric substrate 10 has a rectangular excitation portion 14 having longer sides parallel to an X axis and shorter sides parallel to a Z' axis, and a peripheral portion 12 having a smaller thickness than the excitation portion 14 and formed around the excitation portion 14. Each of side surfaces 14a, 14b of the excitation portion 14 extending in a direction parallel to the X axis is in a single plane, and each of side surfaces 14c, 14d of the excitation portion 14 extending in a direction parallel to the Z' axis has a step. |
