发明名称 |
THIN-FILM TRANSISTOR AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
According to one embodiment, a thin-film transistor comprises an oxide semiconductor layer formed on a part of a substrate, a first gate insulator film of a silicon dioxide film formed on the oxide semiconductor layer and by the CVD method with a silane-based source gas, a second gate insulator film of a silicon dioxide film formed on the first gate insulator film by the CVD method with a TEOS source gas, and a gate electrode formed on the second gate insulator film. |
申请公布号 |
US2015263142(A1) |
申请公布日期 |
2015.09.17 |
申请号 |
US201514729117 |
申请日期 |
2015.06.03 |
申请人 |
Japan Display Inc. |
发明人 |
HIRAMATSU Masato;FUCHI Masayoshi;ISHIDA Arichika |
分类号 |
H01L29/66;H01L21/02;H01L21/465;H01L29/786 |
主分类号 |
H01L29/66 |
代理机构 |
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代理人 |
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主权项 |
1. A method for manufacturing a thin-film transistor comprising:
forming an oxide semiconductor layer on a part of a substrate; forming a first gate insulator film of a silicon dioxide film on the oxide semiconductor layer and the substrate to cover end portions of the oxide semiconductor layer, by the CVD method with a silane-based source gas; forming a second gate insulator film of a silicon dioxide film on the first gate insulator film by the CVD method with a TEOS source gas; and forming a gate electrode on the second gate insulator film. |
地址 |
Minato-ku JP |