| 发明名称 |
SMART CHAMBER AND SMART CHAMBER COMPONENTS |
| 摘要 |
A process chamber includes a chamber body having a chamber lid assembly disposed thereon, one or more monitoring devices coupled to the chamber lid assembly, and one or more antennas disposed adjacent to the chamber lid assembly that are in communication with the one or more monitoring devices. |
| 申请公布号 |
WO2015138091(A1) |
申请公布日期 |
2015.09.17 |
| 申请号 |
WO2015US16060 |
申请日期 |
2015.02.16 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
BINNS, SIMON NICHOLAS;WEST, BRIAN T.;SCHAUER, RONALD VERN;JOHNSON, ROGER M.;COX, MICHAEL S. |
| 分类号 |
H01L21/02;H01L21/203 |
主分类号 |
H01L21/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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