发明名称 SEMICONDUCTOR STORAGE DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 A semiconductor storage device includes a semiconductor substrate; an active region provided in the semiconductor substrate and extending in a first direction; and a plurality of gates provided above the active region and extending in a second direction. The gates are provided with a stack of a floating gate and a control gate, and an elevated portion is provided above the active region disposed between adjacent gates.
申请公布号 US2015263161(A1) 申请公布日期 2015.09.17
申请号 US201414581156 申请日期 2014.12.23
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 YAGISHITA Atsushi
分类号 H01L29/788;H01L21/28;H01L21/02;H01L29/66;H01L29/06 主分类号 H01L29/788
代理机构 代理人
主权项 1. A semiconductor storage device comprising: a semiconductor substrate; an active region provided in the semiconductor substrate and extending in a first direction; and a plurality of gates provided above the active region and extending in a second direction; the gates being provided with a stack of a floating gate and a control gate, and an elevated portion provided above the active region disposed between adjacent gates.
地址 Minato-ku JP