发明名称 SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
摘要 <p>PROBLEM TO BE SOLVED: To provide a semiconductor device and a manufacturing method of the same, which can inhibit current collapse.SOLUTION: A semiconductor device comprises: a channel layer 3 formed on a semiconductor substrate 1; a barrier layer 4 which is formed on the channel layer 3 and composed of an In-containing nitride semiconductor; a gate electrode 8 partially formed on the barrier layer 4; a chap layer 5 which is partially formed on the barrier layer 4 and composed of a nitride semiconductor; and a drain electrode 7 partially formed on the cap layer 5. An end of the gate electrode 8 on the side near the drain electrode 7 and the cap layer 5 are formed at a distance from each other.</p>
申请公布号 JP2015165530(A) 申请公布日期 2015.09.17
申请号 JP20140040038 申请日期 2014.03.03
申请人 MITSUBISHI ELECTRIC CORP 发明人 SUZUKI YOSUKE;YAGYU EIJI;SUITA MUNEYOSHI;NANJO TAKUMA;IMAI AKIFUMI;KURAHASHI KENICHIRO;NAKAMURA MARIKA
分类号 H01L21/338;H01L29/778;H01L29/812 主分类号 H01L21/338
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