发明名称 CUTTING APPARATUS
摘要 <p>The present invention provides a cutting apparatus which is able to appropriately detect an abnormality during a cutting process. The cutting apparatus includes: a vibration signal generation means (68) which generates a vibration signal corresponding to a vibration of a cutting blade (60); and a control means (78) which determines a state of the cutting blade based on the vibration signal generated in the vibration signal generation means. The vibration signal generation means includes: an ultrasound vibrator (70) which is installed on a first flange member (46) and generates a voltage equivalent to the vibration signal corresponding to the vibration of the cutting blade; and a transmission means (72) which is connected to the ultrasound vibrator and transmits the voltage to the control means. A plurality of ultrasound vibrators (70a, 70b, 70c) having different resonance frequencies are connected to a first coil means (74) forming the transmission means in parallel and installed on the first flange member.</p>
申请公布号 KR20150105222(A) 申请公布日期 2015.09.16
申请号 KR20150030226 申请日期 2015.03.04
申请人 DISCO CORPORATION 发明人 KUBO MASAHIRO;NAKANISHI YUJI;IZUMI KUNIHARU
分类号 H01L21/78;H01L21/463;H01L23/00 主分类号 H01L21/78
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