用于校准制动轮的座标的方法及用于处理衬底的设备;METHOD FOR CALIBRATING COORDINATES OF HEADBLOCK AND APPARATUS FOR PROCESSING SUBSTRATE

摘要

本发明涉及用于校准制动轮的座标的方法及用于处理衬底的设备。根据本发明的示范性实施例，一种用于校准制动轮的座标以校准设置于支架中的多个制动轮的过程开始座标的方法包含：在辨识衬底上的对准标记时理解个别系统座标，所述个别系统座标为制动轮移动构件的座标；通过从所述个别系统座标减去对准衬底座标而计算个别偏移，所述对准衬底座标为所述对准标记的所述衬底上的座标；以及对所述个别偏移及对于每一制动轮所请求的移动请求座标求和以计算每一制动轮的移动校准座标。; calculating individual offsets by subtracting align substrate coordinates which are coordinates on the substrate of the align mark from the individual system coordinates; and summing the individual offsets to moving request coordinates requested for each headblock to calculate moving calibration coordinates for each headblock.