发明名称 |
METHOD OF PRODUCING CURED PRODUCT AND METHOD OF FORMING PATTERN |
摘要 |
The present invention provides a photo-curable composition that requires a small mold-releasing force in a method of producing a cured product and also provides a method of producing a cured product with a small mold-releasing force. The method of producing a cured product includes applying a photo-curable composition onto a base material; pressing a mold to the photo-curable composition to form a pattern in the photo-curable composition; irradiating the photo-curable composition provided with the pattern with first light to generate a cured product having the pattern; and releasing the mold from the cured product, wherein a gas-generating region is formed from a gas-generating agent between the cured product and the mold; the gas-generating region is irradiated with second light to generate a gas in the gas-generating region; and the mold is released from the cured product after the generation of the gas or simultaneously with the generation of the gas. |
申请公布号 |
EP2795667(A4) |
申请公布日期 |
2015.09.16 |
申请号 |
EP20120860865 |
申请日期 |
2012.12.12 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
SUZUKI, TATSUYA;ITO, TOSHIKI;MIHARA, CHIEKO |
分类号 |
H01L21/027;C08F2/00;C08F2/46 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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