发明名称 METHOD OF PRODUCING CURED PRODUCT AND METHOD OF FORMING PATTERN
摘要 The present invention provides a photo-curable composition that requires a small mold-releasing force in a method of producing a cured product and also provides a method of producing a cured product with a small mold-releasing force. The method of producing a cured product includes applying a photo-curable composition onto a base material; pressing a mold to the photo-curable composition to form a pattern in the photo-curable composition; irradiating the photo-curable composition provided with the pattern with first light to generate a cured product having the pattern; and releasing the mold from the cured product, wherein a gas-generating region is formed from a gas-generating agent between the cured product and the mold; the gas-generating region is irradiated with second light to generate a gas in the gas-generating region; and the mold is released from the cured product after the generation of the gas or simultaneously with the generation of the gas.
申请公布号 EP2795667(A4) 申请公布日期 2015.09.16
申请号 EP20120860865 申请日期 2012.12.12
申请人 CANON KABUSHIKI KAISHA 发明人 SUZUKI, TATSUYA;ITO, TOSHIKI;MIHARA, CHIEKO
分类号 H01L21/027;C08F2/00;C08F2/46 主分类号 H01L21/027
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