| 摘要 |
A three-dimensional shape measuring apparatus (100) a pluraluty of projectors each comprising a light source (323), a digital mirror device, DMD, (326) for applying stripe pattern light to an inspection target including light portions and dark portions, and an objective lens (327). An imaging device (31) images the inspection target portion to which the stripe pattern light is applied, with which information about the height of an inspection target portion (110) can be acquired. Each DMD includes a plurality of mirrors (326a) arranged in a diamond pattern. Inside each projector the DMD and the source may be rotatable about the normal to the reflection surface of the DMD, which is non parallel to the optical axis of the objective lens. The projection lens may be configured to be relatively movable in a direction parallel to the reflecting surface of the DMD. The DMD may be configured to apply the stripe pattern light to the inspection target portion such that light intensity is larger on a farther side from the projector than on a closer side therefrom. |
