| 摘要 |
A sensor structure including a first diaphragm structure, an electrode element, and a second diaphragm structure arranged on an opposite side of the electrode element from the first diaphragm structure is disclosed. The sensor structure may also include a chamber formed by the first and second diaphragm structures, where a pressure in the chamber is lower than the pressure outside the chamber. A method to form the sensor structure is likewise disclosed. |
