目标配置最佳化及相关联的目标;OPTIMIZATION OF TARGET ARRANGEMENT AND ASSOCIATED TARGET

摘要

本发明揭示一种设计一目标配置之方法，以及相关联的目标及光罩。该目标包含复数个光栅，每一光栅包含复数个子结构。该方法包含如下步骤：界定一目标区域；将该等子结构定位于该目标区域内以便形成该等光栅；及将辅助特征定位于该等光栅之周边处，该等辅助特征经组态以缩减该等光栅之该周边处之测定强度峰值。该方法可包含一最佳化程序，该最佳化程序包含：模型化藉由使用一度量衡程序进行的该目标之检测而获得的一所得影像；及评估是否为了使用一度量衡程序之侦测而最佳化该目标配置。; locating the substructures within the target area so as to form the gratings; and locating assist features at the periphery of the gratings, the assist features being configured to reduce measured intensity peaks at the periphery of the gratings. The method may comprise an optimization process comprising modelling a resultant image obtained by inspection of the target using a metrology process; and evaluating whether the target arrangement is optimized for detection using a metrology process.