| 摘要 |
本发明揭示一种用于藉由X射线萤光进行测量物件(24)的测量、特别是用于测量物件(24)的薄层的厚度的测量或元素浓度的决定的方法，其中，将初级射束(22)从X射线辐射源(21)指引到该测量物件(24)上，从测量物件(24)发射的次级辐射(26)被检测器(27)检测并被转送到评估装置(29)，其中该初级射束(22)在被分成网格部分表面(1...n)以及被再分成至少一个列(Z1至Zn)和至少一个行(S1…Sn)的网格表面(31)内移动，并且将初级射束(22)指引到用于每个网格部分表面(1…n)的该网格表面(31)上，其中该初级射束(22)的测量光斑(36)至少填充该网格点，其中，检测该测量物件(24)的该测量表面(25)的横向尺寸，将该测量物件(24)的该测量表面(25)的横向尺寸与出现在该测量物件(24)上的该初级射束(22)的测量光斑(36)的尺寸相比较，针对决定小于测量光斑(36)的该测量物件(24)的该测量表面(25)的尺寸，选择该网格表面(31)的尺寸，其至少覆盖该测量物件(24)的该测量表面(25)，根据该网格表面(31)的尺寸与该测量物件(24)的该测量表面(25)的尺寸的比来决定比例因数α，从各自的网格部分表面(1…n)将该次级辐射(26)的所检测光谱相加、求平均值且随后乘以该比例因数α，以及提供用该比例因数α进行修正的来自该网格部分表面(1…n)的次级辐射(26)的光谱以用于定量评估。 The invention relates to a method for the measurement of a measurement object (24) by means of X-ray fluorescence, in particular for the measurement of the thickness of thin layers or determination of an element concentration of a measurement object (24), in which a primary beam (22) is directed from an X-ray radiation source (21) onto the measurement object (24), for which a secondary radiation (26) emitted by the measurement object (24) is detected by a detector (27) and is relayed to an evaluation device (29) in which the primary beam (22) is moved within a grid surface (31) which is divided into grid partial surfaces (1…n) as well as subdivided into at least one line (Z1…Zn) and at least one column (S1…Sn), and for each grid partial surface (1…n), a primary beam (22) is directed onto the grid surface (31), wherein a measuring spot (36) of the primary beam fills at least the grid point, wherein a lateral dimension of the measurement surface (25) of the measurement object (24) is detected, the lateral dimension of the measurement surface (25) of the measurement object (24) is compared to the size of the measuring spot (36) of the primary beam (22) appearing on the measurement object (24), for the determination of the size of the measurement surface (25) of the measurement object (24) which is smaller than the measuring spot (36), a size of the grid surface (31) is selected which covers at least the measurement surface (25) of the measurement object (24), a scaling factor α is determined from a ratio of the size of the grid surface (31) to the size of the measurement surface (25) of the measurement object (24), the detected spectrum of the secondary radiation (26) is added up from the respective grid partial surfaces (1…n), averaged and subsequently multiplied by the scaling factor α and the spectrum of the secondary radiation (26) from the grid partial surfaces (1…n) which is corrected with the scaling factor α |
