| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for controlling surface wettability from water repellency to hydrophilicity. <P>SOLUTION: The method for controlling wettability includes: a step 1 of preparing a base material having a surface to be deposited, the surface having a water contact angle ofθ1; a step 2 of forming a thin film on the surface to be deposited, the thin film having a water repellent surface having a water contact angleθ2 larger than the water contact angleθ1 of the surface to be deposited; and a step 3 allowing the water repellent surface to be brought into contact with a water-containing process liquid and changing the water repellent surface to have a water contact angleθ3 smaller than the water contact angleθ1 of the surface to be deposited. The thin film includes silicon (Si), carbon (C), oxygen (O) and hydrogen (H) as constituent elements, and, when the water repellent surface is measured by reflection absorption spectroscopy (RAS method) using a Fourier transform near infrared spectrophotometer (FT-IR), a peak intensity at a wave number of 2,000-2,300 cm<SP POS="POST">-1</SP>is larger than a peak intensity at a wave number of 3,200-3,500 cm<SP POS="POST">-1</SP>. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
