| 摘要 |
<p>The invention provides a disturbing force compensating control device, which can calculate disturbing force caused by friction force generated between movable parts in high precision, and perform high precision positioning via high precision disturbing estimation. A disturbing force model is set based on movable part friction force between sliding faces of the movable parts generated between a first movable part (10) and a second movable part (20) in a connection. Based on a first target position instruction value of a first actuator (30) driving the first movable part (10), a first referential thrust instruction value is calculated. Based on a second target position instruction value of a second actuator (40) driving the second movable part (20) and the disturbing force model, a first disturbing force generated by the action of the second movable part (20) acting upon the action of the first movable part (10) due to influence of friction force between the movable parts is calculated. Furthermore, through add of the first referential thrust instruction value and the first disturbing force, a first compensating thrust instruction value is calculated, and the first actuator (30) is controlled based on the first compensating thrust instruction value.</p> |
