发明名称 半導体発光素子およびその製造方法
摘要 It is an object to provide a semiconductor light emitting diode capable of suppressing peeling at a pad portion during wire bonding while maintaining the improvement in the output of the light emitting diode due to a reflective layer and a light transmitting insulating layer provided right under the pad. It is another object of the present invention to provide a method of manufacturing the same. A semiconductor light emitting diode 100 of the present invention includes a semiconductor layer including a light emitting portion, and a pad electrode 105 located on the semiconductor layer 104, the semiconductor light emitting diode 100 further including, between the semiconductor layer 104 and the pad electrode 105, a reflective portion 108 including a light transmitting insulating layer 106 serving as a current blocking layer located on the semiconductor layer 104, and a reflective layer 107 located on the light transmitting insulating layer 106; a contact portion formed from an ohmic electrode 109 in contact with the reflective portion 108, located on the semiconductor layer 104; and a conductive hard film 110 between the reflective layer 107 and the pad electrode 105, the conductive hard film 110 having HV × t > 630, where the Vickers hardness is HV (Hv) and the thickness is t (µm).
申请公布号 JP5779642(B2) 申请公布日期 2015.09.16
申请号 JP20130503400 申请日期 2012.03.09
申请人 DOWAエレクトロニクス株式会社 发明人 田崎 寛郎;山田 秀高;十川 博行
分类号 H01L33/40;H01L33/46 主分类号 H01L33/40
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