发明名称 |
CAROUSEL CARRIER FOR A VACUUM TREATMENT INSTALLATION |
摘要 |
The present invention relates to a vacuum treatment installation having carousel carriers, in which the carousel drive is arranged on the wall that is located opposite the door of the vacuum treatment installation. In this way, the coupling of the carousel of the carousel carrier to the carousel drive is ensured without any further mechanism. |
申请公布号 |
EP2758562(B1) |
申请公布日期 |
2015.09.16 |
申请号 |
EP20120756100 |
申请日期 |
2012.08.29 |
申请人 |
OERLIKON TRADING AG, TRÜBBACH |
发明人 |
GWEHENBERGER, JUERGEN |
分类号 |
C23C14/50;B23Q3/00;B23Q7/02;C23C16/458;H01L31/18 |
主分类号 |
C23C14/50 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|