| 摘要 |
<p>The micro-pump has a pumping chamber (4) communicating with exterior via a flexible diaphragm (2). The diaphragm is secured to an actuator (5) e.g. piezoelectric bi-morph or multi-morph actuator or shape memory alloy actuator, arranged at the exterior of the micro-pump. The diaphragm is secured to the actuator by an element that is in the form of a strip (6), which is rigid along its main axis and flexible in the direction perpendicular to the main axis, where the strip is made of stainless steel. The actuator has a fixed end (8) fixed on a rigid support plate (11) that is made of ceramic.</p> |
