OPTICAL SYSTEM FOR AN INSTALLATION FOR PROCESSING THIN-FILM LAYERS

摘要

An optical system (10) for an installation for processing thin-film layers is presented. The optical system (10) comprises at least two optical fibres (20) for guiding light, wherein each of the optical fibres (20) has a rectangular cross section with a short fibre axis (x) and a long fibre axis (y). The optical system (10) also comprises an optical coupling-in device (22) for coupling light into the optical fibres (20) and an optical imaging device (24) for generating in an illuminating plane (50) an illuminating line (44) that is formed by light rays (14'; 40; 40a, 40b) emerging from the optical fibres (20) and has a long axis and a short axis. The optical imaging device (24) comprises an anamorphic lens (42), which is designed to focus the light rays (40a, 40b) emerging from the optical fibres (20) with respect to the short fibre axis (x) onto the short axis of the illuminating line (44) and to superpose them in a homogenized manner with respect to the long fibre axis (y) in the illuminating line (44).