| 摘要 |
<p>Method for estimating a gas flow in an enclosure maintained in a low pressure regimen relative to the gas, including: measuring, as a function of time, a gas flow Jmeasurement in the enclosure, and estimating values of the parameters A and B iteratively implemented by decreasing an estimation error based on a difference between Jestim(t) and Jmeasurement, and wherein, when Jmeasurement corresponds to a pressure rise of the gas in the enclosure, Jestim(t) is calculated according to the equation: J estim ( t ) = 2 A ∑n = 1 n ma x ( Bπ ( t - OffX ) ) 1 2 exp ( - 2 ( n + 1 ) 2 4 B ( t - OffX ) ) + OffY and when Jmeasurement corresponds to a pressure decrease of the gas in the enclosure, Jestim(t) is calculated according to the equation: J estm ( t ) = P init - 2 A ∑n = 1 n ma x ( Bπ ( t - OffX ) ) 1 2 exp ( - ( 2 n + 1 ) 2 4 B ( t - OffX ) ) + OffY</p> |
