DOUBLE DIAPHRAGM MEMS MICROPHONE WITHOUT A BACKPLATE ELEMENT

摘要

A sensor structure is disclosed. The sensor structure may include a first suspended structure and a second suspended structure disposed from the first suspended structure to form a volume. The first suspended structure and the second suspended structure may be arranged relative to each other such that a received pressure wave entering the volume between the first suspended structure and the second suspended structure generates a displacement of the first suspended structure in a first direction and a displacement of the second suspended structure in a second direction different from the first direction and the displacement may generate a measurable signal.