| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To restrain damage generated at a local portion of a cleaned object surface, and obtain a stable cleaning performance in ultrasonic cleaning. <P>SOLUTION: In an ultrasonic cleaning method, a cleaned object is immersed and held in a cleaning liquid inside a processing tank housing the cleaning liquid, and high-frequency power generated by changing a frequency in a certain range with an ultrasonic vibration transmitter is applied to an ultrasonic vibration generating part to generate ultrasonic vibration. The generated ultrasonic vibration is propagated in the cleaning liquid in which the cleaned object inside the processing tank is immersed to ultrasonic-clean the cleaned object. The high-frequency power in a frequency band corresponding to a resonance frequency band of the cleaned object among the high-frequency power applied to the ultrasonic vibration generating part from the ultrasonic vibration transmitter and generated by changing the frequency in a certain range is changed to the high-frequency power in the other frequency band and applied to the ultrasonic vibration generating part. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
