发明名称 半導体装置
摘要 <p>A method for easily manufacturing a semiconductor device in which variation in thickness or disconnection of a source electrode or a drain electrode is prevented is proposed A semiconductor device includes a semiconductor layer formed over an insulating substrate; a first insulating layer formed over the semiconductor layer; a gate electrode formed over the first insulating layer; a second insulating layer formed over the gate electrode; an opening which reaches the semiconductor layer and is formed at least in the first insulating layer and the second insulating layer; and a step portion formed at a side surface of the second insulating layer in the opening.</p>
申请公布号 JP5779266(B2) 申请公布日期 2015.09.16
申请号 JP20140065149 申请日期 2014.03.27
申请人 发明人
分类号 H01L29/786;H01L21/28;H01L21/336;H01L21/768;H01L23/522;H01L29/41;H01L51/50 主分类号 H01L29/786
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