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发明名称
光学量测装置及光学量测方法
摘要
一种光学量测装置包含一光学模组、一微分单元、一比较单元,及一计算器,该光学模组发射一雷射光束至一待测物体的表面产生一相关于表面的反射光,且该反射光与该雷射光束产生一自混干涉信号,并该光学模组侦测该自混干涉信号以得到一侦测信号,该微分单元电连接该光学模组以接收该侦测信号,并将该侦测信号进行微分来产生一微分信号,该比较单元电连接该微分单元以接收该微分信号,并根据该微分信号产生一准位信号,该计算器电连接该比较单元以接收该准位信号,并将每一准位信号进行累加计算,得到一相关于待测物体的表面形貌的资讯。
申请公布号
TW201534861
申请公布日期
2015.09.16
申请号
TW103107683
申请日期
2014.03.06
申请人
国立中兴大学 NATIONAL CHUNG-HSING UNIVERSITY
发明人
洪瑞华;瓦诺 希尔 DONATI, SILVANO
分类号
G01B11/24(2006.01)
主分类号
G01B11/24(2006.01)
代理机构
代理人
高玉骏杨祺雄
主权项
地址
台中市南区国光路250号 TW
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