Method for fabricating a magnetic write pole using vacuum deposition

摘要

A method and system provide a magnetic transducer having an air-bearing surface (ABS) and an intermediate layer. A trench having a shape and location corresponding to a main pole is formed in the intermediate layer. The main pole is provided. At least a portion of the main pole is in the trench. Providing the main pole further includes vacuum depositing a first main pole material layer. The first main pole material layer is thin enough to preclude filling of the trench. The first main pole material layer is then ion beam etched. A second main pole layer is vacuum deposited on the first main pole layer. The second main pole material layer is also thin enough to preclude filling of the trench. An additional main pole layer is also deposited.

主权项

1. A method for fabricating magnetic transducer having air-bearing surface (ABS) location and an intermediate layer comprising:
forming a trench in the intermediate layer, the trench having a shape and location corresponding to a main pole; providing a main pole, at least a portion of the main pole residing in the trench, the step of providing the main pole further including
vacuum depositing a first main pole material layer, the first main pole material layer being thin enough to preclude filling of the trench;ion beam etching a portion of the first main pole material layer within the trench;vacuum depositing a second main pole layer, the second main pole material layer being thin enough to preclude filling of the trench; anddepositing an additional main pole layer.