Resonator element, resonator, electronic device, electronic apparatus, and method of manufacturing resonator element

摘要

A resonator element includes a substrate including a vibrating portion that performs thickness-shear vibration and an excitation electrode provided on top and bottom main surfaces of the vibrating portion. Assuming that the average plate thickness calculated from the plate thicknesses of a plurality of regions of the vibrating portion is H and the plate thickness difference, which is a difference between the maximum and minimum values of the plate thicknesses of the plurality of regions of the vibrating portion, is ΔH, 0%<ΔH/H≦0.085% is satisfied as a relationship between H and ΔH.

主权项

1. A resonator element comprising:
a substrate including a vibrating portion that performs thickness-shear vibration in a first direction and an excitation electrode provided on top and bottom main surfaces of the vibrating portion, wherein when an average plate thickness calculated from plate thicknesses of a plurality of regions of the vibrating portion is H and a plate thickness difference between maximum and minimum values of the plate thicknesses is ΔH, 0% <ΔH/H≦0.085% is satisfied, and the substrate includes:
a first region having the vibrating portion; anda second region that is continuously formed from an outer peripheral of the first region, whereina first thickness of the first region is smaller than a second thickness of the second region,the outer peripheral of the first region includes:
first and second peripherals extended in a second direction perpendicular to the first direction; andthird and fourth peripherals extended in the first direction, whereinthe first and second peripherals are separated in the first direction, andthe third and fourth peripherals are separated in the second direction, andthe second region includes:
a first inclined portion in which a thickness increases from a first end that is continuously connected to the first peripheral toward a second end,a first thick body portion that is continuously connected to the second end of the first inclined portion,a second inclined portion in which a thickness increases from a third end that is continuously connected to the second peripheral toward a fourth end,a second thick body portion that is continuously connected to the fourth end of the second inclined portion,a third inclined portion in which a thickness increases from a fifth end that is continuously connected to the third peripheral toward a sixth end, anda third thick body portion that is continuously connected to the sixth end of the third inclined portion.