| 摘要 |
The invention concerns a MEMS sensor and a method for detecting accelerations along, and rotation rates about, at least one, preferably two of three mutually perpendicular spatial axes x, y and z by means of a MEMS sensor (1), wherein at least one driving mass (6; 6.1, 6.2) and at least one sensor mass (5) are moveably arranged on a substrate (2) and the at least one driving mass (6; 6.1, 6.2) is moved relative to the at least one sensor mass (5) in oscillation at a driving frequency and when an external acceleration of the sensor occurs, driving mass/es (6; 6.1, 6.2) and sensor mass/es (5) are deflected at an acceleration frequency and, when an external rotation rate of the sensor (1) occurs, are deflected at a rotation rate frequency, and the acceleration frequency and rotation rate frequency are different. At the MEMS-sensor the driving mass/es (6; 6.1, 6.2) and sensor mass/es (5) are arranged on the substrate (2), and are balanced in the resting state by means of at least one of the anchors (3). In the driving mode the driving mass/es (6; 6.1, 6.2), when vibrating in oscillation about this at least one anchor (3), generate/s an imbalance of the driving mass/es (6; 6.1, 6.2) and the sensor mass/es (5) with respect to this at least one anchor (3), and the sensor elements detect deflections of the driving and sensor masses, due to torques and Coholis forces generated, with an acceleration frequency and/or a rotation rate frequency. |
| 主权项 |
1. A micro-electro-mechanical-system (MEMS) sensor for detecting accelerations along and rotational movements about at least one of three mutually perpendicular spatial axes, x, y, and z, comprising:
a substrate arranged in an x-y plane; at least one driving mass adapted to oscillate in a plane parallel to the substrate and driven in a linear motion along the x-axis; at least one sensing mass connected to the least one driving mass via connecting springs, wherein the connecting springs bend to move the at least one sensing mass in a linear motion relative to the at least one driving mass during operation; at least one anchor secured to the substrate and at least one anchor spring connected to the at least one driving mass or the at least one sensing mass; sensing elements for sensing acceleration, rotation, or both of the MEMS sensor; and drive elements for driving the at least one driving mass relative to the at least one sensing mass at a driving frequency, wherein the at least one driving mass is adapted to generate an imbalance of the at least one driving mass and the at least one sensing mass with respect to the at least one anchor during operation. |
