Hollow cell array structure and method and apparatus for producing hollow cell array structure

摘要

A disclosed method for producing a hollow cell array structure includes a first step of layering a deformable material capable of being plastically deformed under a predetermined condition on a first substrate, the first substrate having plural, mutually separated depressions in a surface thereof, such that the deformable material forms mutually isolated spaces in the corresponding depressions; a second step of expanding the spaces in the plural depressions by inducing a gas pressure of the spaces while extending the deformable material on the first substrate, such that plural hollow cells are simultaneously formed in correspondence to the plural depressions in predetermined directions; and a third step of selectively solidifying portions of the plural hollow cells by selectively applying ultraviolet rays thereto.

主权项

1. A method for producing a hollow cell array structure, comprising:
layering a deformable material capable of being cured by evaporation of a solvent contained within the deformable material on a first substrate, the first substrate having plural, mutually separated depressions, such that the deformable material forms mutually isolated spaces in the corresponding depressions; layering a second substrate having solvent transmittable patterns on the first substrate having the plural depressions via the deformable material forming the mutually isolated spaces in the plural depressions, and expanding the spaces in the plural depressions by inducing a gas pressure of the spaces while extending the deformable material, such that plural hollow cells are contemporaneously formed m correspondence to the plural depressions in defined directions; and selectively solidifying side cell walls of the plural hollow cells by selectively evaporating the solvent from the deformable material of the side cell walls of the plural hollow cells via the solvent transmittable patterns formed on the second substrate, the side cell walls being located in directions substantially perpendicular to the substrate, wherein in the selectively solidifying, the side cell walls of the plural hollow cells are selectively solidified by selectively evaporating the solvent from the deformable material thereto via the solvent transmittable of the first substrate.