Flowmeter

摘要

A flowmeter that improves a corrosion resistance is provided.;The flowmeter includes a silicon substrate having a diaphragm where a heater is formed, an aluminum pad formed on a silicon substrate, an organic protective film laminated on the silicon substrate, and a mold resin that covers the silicon substrate. The diaphragm has an exposed portion exposed from the organic protective film, an adhesion surface high in adhesion property to the mold resin is laminated on the silicon substrate, and an adhesion film of the mold resin to the adhesion film is provided between the exposed portion and the aluminum pad.

主权项

1. A flowmeter comprising:
a silicon substrate having a diaphragm where a heater is disposed; an aluminum film including an aluminum pad or an aluminum wire disposed on the silicon substrate; an organic protective film laminated on the silicon substrate; and a mold resin that covers the silicon substrate, wherein the diaphragm has an exposed portion exposed from the organic protective film, wherein an adhesion film having a high adhesion property to the mold resin is laminated on the silicon substrate, wherein an adhesion surface of the mold resin adhering to the adhesion film is provided between the exposed portion and the aluminum pad, and wherein the organic protective film comprises:
a first organic protective film disposed to surround the diaphragm; anda second organic protective film disposed to surround an edge of the diaphragm.