发明名称 |
Mikromekaanisesti säädettävä Fabry-Perot interferometrijärjestelmä ja menetelmä tämän aikaansaamiseksi |
摘要 |
The invention relates to controllable Fabry-Perot interferometers which are produced with micromechanical (MEMS) technology. The prior art interferometers have a temperature drift which causes inaccuracy and requirement for complicated packaging. According to the invention the interferometer arrangement has both an electrically tuneable interferometer and a reference interferometer on the same substrate. The temperature drift is measured with the reference interferometer and this information is used for compensating the measurement with the tuneable interferometer. The measurement accuracy and stability can thus be improved and requirements for packaging are lighter. |
申请公布号 |
FI125368(B) |
申请公布日期 |
2015.09.15 |
申请号 |
FI20120005629 |
申请日期 |
2012.06.08 |
申请人 |
TEKNOLOGIAN TUTKIMUSKESKUS VTT OY |
发明人 |
ANTILA, JARKKO;BLOMBERG, MARTTI |
分类号 |
G01J3/26;G02B5/28 |
主分类号 |
G01J3/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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