COMBINED PUMPING SYSTEM COMPRISING A GETTER PUMP AND AN ION PUMP

摘要

A combined pumping system comprising a getter pump (120; 220) and an ion pump (130; 230) is described. The getter pump and the ion pump (120, 130; 220, 230) are mounted in series on a same flange (111; 211) and respectively arranged on opposite sides thereof so that both getter and ion pumps conductance are maximized towards gas flux sources in a vacuum chamber in order to improve the vacuum level of the system.