Optical element unit and method of supporting an optical element

摘要

There is provided an optical element unit comprising an optical element, a connector element, and an optical element holder. The optical element has a plane of main extension as well as an outer circumference and defines a radial direction. The connector element connects the optical element and the optical element holder, the connector element having a first connector part connected to the optical element at the outer circumference and a second connector part connected to the optical element holder. The first connector part and the second connector part are connected via at least one coupling part, the coupling part being compliant in the radial direction and substantially preventing rotation between the first connector part and the second connector part in a plane substantially parallel to the plane of main extension.

主权项

1. An optical element unit comprising:
an optical element; a plurality of connector elements; and an optical element holder, wherein: said optical element has a plane of main extension as well as an outer circumference and defines a radial direction; said optical element is connected to said optical element holder exclusively by said connector elements; each of said connector elements has a first connector part connected to said optical element at said outer circumference and a second connector part connected to said optical element holder; said first connector part and said second connector part are connected via at least one coupling part arranged kinematically in series between said first connector part and said second connector part; said at least one coupling part is compliant in said radial direction and is configured to substantially prevent rotation between said first connector part and said second connector part in a plane substantially parallel to said plane of main extension; said at least one coupling part is substantially rigid in a direction perpendicular to said plane of main extension of said optical element; said at least one coupling part is a parallel guide configured to provide parallel guidance of said first connector part relative to said second connector part along said radial direction in said plane substantially parallel to said plane of main extension; and said optical element unit is a microlithography optical element unit.