In situ offset compensation for pressure sensors

摘要

A pressure sensor having a substrate and a first, deformable membrane, partially supported by the substrate, which generates a first sensor reading when deformed by pressure. A second membrane is contiguous to the first membrane. When the second membrane is energized, it deforms the first membrane to alter the first sensor reading.

主权项

1. A pressure sensor comprising:
a substrate; a first, deformable membrane, partially supported by the substrate, which generates a first sensor reading when deformed by pressure; and a second deformable membrane contiguous to and touching the first membrane which, when energized, deforms and deforms the first membrane to alter the first sensor reading; wherein the first membrane carries a first electrode which forms capacitance with another electrode spaced from the first electrode to generate the first sensor reading.