Actuator, piezoelectric actuator, electronic device, and method for attenuating vibration and converting vibration direction

摘要

A viscoelastic body is interposed between a vibrating membrane vibrating in association with a piezoelectric vibrator composed of a piezoelectric element and a base and a support member supporting the vibrating membrane. The viscoelastic body attenuates vibration transmitted from the support member to the vibrating membrane and converts vibration of the vibrating membrane in the surface direction parallel to its main surfaces to vibration of the vibrating membrane in the direction nearly perpendicular to the surface direction. The vibrating membrane is annular with an opening at the center, and the base is joined to the vibrating membrane coaxially with opening.

主权项

1. A piezoelectric actuator, comprising:
a piezoelectric vibrator composed of a piezoelectric element and a base vibrated by the piezoelectric element; a vibrating membrane joined to the outer peripheral part of a main surface of the base and vibrating in association with vibration of the piezoelectric vibrator; a support member supporting the vibrating membrane; and a first vibration direction converter interposed between the vibrating membrane and support member and deforming to convert vibration of the vibrating membrane in the surface direction parallel to its main surfaces to vibration of the vibrating membrane in the direction nearly perpendicular to the surface direction, a second vibration direction converter that is different in rigidity from the first vibration direction converter, wherein one surface of the first vibration direction converter is joined to the supporting member, and another surface opposing to the one surface is joined to the main surface of the vibrating membrane, and wherein the vibrating membrane is clamped by the first vibration direction converter and the second vibration direction converter.