发明名称 |
Measurement apparatus and method, tomography apparatus and method |
摘要 |
A measurement apparatus including a convergence unit for converging the electromagnetic wave to the object; a detection unit for detecting electromagnetic waves from the object; and an adjustment unit for adjusting a relative position between the object and the convergence position set by the convergence unit in a detecting region selected by using interval information about an interval between a first electromagnetic wave from the first reflecting surface and a second electromagnetic wave from the second reflecting surface, the first and second electromagnetic waves being acquired by using a detection result of the detection unit, in which the detecting region is a region in which a measurement position of the object at the time of detecting electromagnetic waves from the object is determined based on relative position information selected from and by using a plurality of pieces of information on the relative position corresponding to the interval information. |
申请公布号 |
US9134182(B2) |
申请公布日期 |
2015.09.15 |
申请号 |
US201313894065 |
申请日期 |
2013.05.14 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
Itsuji Takeaki |
分类号 |
G01J5/02;G01N21/55;G01N21/3581;G01N21/47;G01J3/42 |
主分类号 |
G01J5/02 |
代理机构 |
Fitzpatrick, Cella, Harper & Scinto |
代理人 |
Fitzpatrick, Cella, Harper & Scinto |
主权项 |
1. A measuring apparatus for measuring an object, the object having a first reflecting surface and a second reflecting surface along a propagation path of an electromagnetic wave, the measuring apparatus comprising:
a convergence unit for converging the electromagnetic wave to the object that is to be measured; a detection unit for detecting electromagnetic waves from the object; and an adjustment unit for adjusting a relative position between the object and the convergence position set by said convergence unit, and arranging the first reflecting surface and the second reflecting surface in a detecting region, wherein the detecting region is determined by using a plurality of pieces of information about the relative position, and information about a time interval between a first electromagnetic wave from the first reflecting surface and a second electromagnetic wave from the second reflecting surface in a time waveform acquired by using a detection result provided by said detection unit for the relative position corresponding to each of the plurality of pieces of information. |
地址 |
Tokyo JP |