发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
摘要 This semiconductor device is provided with: a silicon pillar that is provided by digging from a main surface of a semiconductor substrate; a first diffusion layer that is provided above the silicon pillar; a second diffusion layer, that is provided from a bottom portion of the silicon pillar to one region of the semiconductor substrate, said one region being continuous to the silicon pillar; a gate electrode in contact with at least a first side surface of the silicon pillar with a gate insulating film therebetween; a first embedding insulating film that surrounds the gate electrode; a second embedding insulating film in contact with a second side surface of the silicon pillar, said second side surface facing the first side surface of the silicon pillar; and a conductive layer, which is electrically connected to the second diffusion layer, and which is in contact with the second embedding insulating film at a position separated from the silicon pillar.
申请公布号 KR20150104121(A) 申请公布日期 2015.09.14
申请号 KR20157020449 申请日期 2014.01.07
申请人 PS5 LUXCO S.A.R.L. 发明人 SUKEKAWA MITSUNARI
分类号 H01L27/108;H01L27/02 主分类号 H01L27/108
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