| 摘要 |
<p>Provided is a method of inspecting the shape of a contact hole. The method of inspecting the shape of a contact hole comprises: obtaining images of contact holes; extracting contours of the contact holes from the images of the contact holes; setting an inner center point of the contours of the contact holes; setting a plurality of cut lines passing through the inner center point; measuring maximum diameters, minimum diameters, and angles of the diameters for each of the contours of the contact holes; and calculating the average maximum diameter and the average minimum diameter of the contact holes and an average angle of each of the diameters using the maximum diameters, minimum diameters, and angles of the diameters.</p> |
