发明名称 SUBSTRATE STORING CONTAINER AND FILTER SECTION FOR SUBSTRATE STORING CONTAINER
摘要 In a board-like member housing chamber (804) of a filter section (80) of a substrate storing container, a board-like member (84) is disposed, said board-like member being capable of, in a board-like member housing chamber (804), moving between a circulation shut off position at which gas circulation from a substrate storing space to a space outside of a container main body is shut off, and a shifted position, which is a position different from the circulation shut off position, and which makes it possible to circulate the gas from the space outside of the container main body to the substrate storing space. The front surface and the rear surface of the board-like member (84) are in a positional relationship wherein the front surface and the rear surface intersect the direction in which an upper wall and a lower wall are connected to each other. When the lower wall of the container main body is positioned at a lower section, and the upper wall is positioned at an upper section, the board-like member (84) is capable of moving to the circulation shut off position by means of the own weight of the board-like member (84).
申请公布号 WO2015132910(A1) 申请公布日期 2015.09.11
申请号 WO2014JP55659 申请日期 2014.03.05
申请人 MIRAIAL CO., LTD. 发明人 OYAMA, TAKAHARU
分类号 H01L21/673;B65D85/86 主分类号 H01L21/673
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