TABLE APPARATUS, MEASURING APPARATUS, MACHINE TOOL, AND SEMICONDUCTOR MANUFACTURING APPARATUS

摘要

A table apparatus (100) is provided with: a first table (1) having a first upper surface; a second table (2), which is disposed on one side of the first table with respect to the first axis direction parallel to a first axis within a predetermined plane, and which has a second upper surface; a first guide apparatus (3) that guides the first table in the first axis direction; and a second guide apparatus (4) that guides the second table in the first axis direction. The first guide apparatus and the second guide apparatus are disposed in the second axis direction that is parallel to a second axis within the predetermined plane, said second axis being orthogonal to the first axis.