发明名称 MEASUREMENT DEVICE AND MEASUREMENT METHOD
摘要 A measurement device (1) is provided with a separation and irradiation means (200) for separating laser light into a first light beam (Ld1) and a second light beam (Ld2) and irradiating the first light beam onto an object under measurement (400), a diffusion means (600) for diffusing the second light beam, and a reception means (500) for receiving the first light beam (Ls) scattered by the object under measurement and the second light beam (Lr) diffused by the diffusion means. This measurement device enables suitable measurement of an object under measurement through detection of a scattered first light beam and a diffused second light beam.
申请公布号 WO2015132880(A1) 申请公布日期 2015.09.11
申请号 WO2014JP55453 申请日期 2014.03.04
申请人 PIONEER CORPORATION 发明人 KIKUCHI, IKUYA;ITO, ATSUYA
分类号 G01F1/66;G01B9/02;G01P5/00 主分类号 G01F1/66
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