| 摘要 |
The present invention provides a mask centering block of a deposition device which guides a mask frame, which is to be placed above a mask base, to be mounted at an accurate position when the mask frame is replaced inside the vacuum chamber of the deposition device, which is used to generate OLED organic films. The mask centering block of a deposition device according to the present invention is used so that a mask frame can be mounted smoothly at an accurate position on a mask base when a mask mounted inside the vacuum chamber of the deposition device is replaced in the deposition device for depositing films of organic matters on top of a substrate. The mask base includes right, left, front and rear centering blocks. Each of the right, left, front and rear centering blocks includes: a fixing block part mounted on the mask base; a main body part placed above the fixing block part, installed so that both side surfaces can rotate around a ball bearing placed between the fixing block part and the both side surfaces, and including a frame mounting part having the mask frame mounted on an upper surface; and a ball flanger installed to penetrate the main body part, having a ball placed on a front surface, and including an adjustment member for adjusting the anteroposterior movement of the ball. The right and left centering blocks further include a position sensor for checking the position of the mask frame when loading the mask. |
