| 摘要 |
The invention relates to an inexpensively producible capacitive pressure sensor, comprising a pressure-dependent, elastically-deformable metallic measuring membrane (1) on which a pressure can be applied, a metallic half-shell (3) which has a front face facing the measuring membrane (1) and connected to an outer edge of a first side of the measuring membrane (1), a pressure chamber (5) enclosed in the half-shell (3) under the measuring membrane (1), a glass filling (11) arranged in the half-shell (3) at a distance from the measuring membrane (1), and a capacitive, electromechanical transducer for metrological detection of a pressure-dependent deformation of the measuring membrane (1). The transducer comprises a measuring electrode (15) arranged on the glass filling (11) and a counter electrode formed by the metallic measuring membrane (1), the measuring electrode (15) being a deep drawn component arranged on a front face of the glass filling (11) facing the measuring membrane (1). |
