发明名称 CAPTEUR D'IMAGES A ILLUMINATION FACE ARRIERE A FAIBLE COURANT D'OBSCURITE
摘要 <p>An integrated circuit includes a back side illuminated image sensor formed by a substrate supporting at least one pixel, an interconnect part situated above a front side of the substrate and an anti-reflective layer situated above a back side of the substrate. The anti-reflective layer may be formed of a silicon nitride layer. An additional layer is situated above the anti-reflective layer. The additional layer is formed of one of amorphous silicon nitride or hydrogenated amorphous silicon nitride, in which the ratio of the number of silicon atoms per cubic centimeter to the number of nitrogen atoms per cubic centimeter is greater than 0.7.</p>
申请公布号 FR3009433(B1) 申请公布日期 2015.09.11
申请号 FR20130057669 申请日期 2013.08.01
申请人 STMICROELECTRONICS (CROLLES 2) SAS;COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES 发明人 CARRERE JEAN-PIERRE;GROS D'AILLON PATRICK;ALLEGRET-MARET STEPHANE;ODDOU JEAN-PIERRE
分类号 H01L27/146;H01L31/02 主分类号 H01L27/146
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