| 摘要 |
The bonding device comprises a table (52) provided to be movable in a Y-axis direction with respect to a base (41), a first reaction member (58A) and a second reaction member (58B) respectively provided to be movable in the Y-axis direction with respect to the base (41). The first reaction member (58A) and the second reaction member (58B) are constituted in such a way as to move, when the table (52) moves in the Y-axis direction, in the opposite direction to the table (52) in the Y-axis direction. The first reaction member (58A) and the second reaction member (58B) are disposed respectively on both sides in the X-axis direction of the table (52). The first reaction member (58A) and the second reaction member (58B) are disposed in such a way that the center of gravity of the first reaction member (58A) and second reaction member (58B) is at a position that is based on the center of gravity of the table (52). In this way, a bonding device is provided, capable of improving the weight balance at the base while suppressing an increase in space. |
