| 摘要 |
A measurement device (1) is provided with a separation and irradiation means (200) for separating laser light (Li) into a plurality of light beams (Ld1, Ld2) and irradiating the plurality of light beams onto different parts (401, 402) of an object under measurement (400) at different angles of incidence and a light reception means (500) for receiving scattered light (Ls1, Ls2) resulting from the plurality of light beams being scattered by the object under measurement. This measurement device reduces damage to an object under measurement resulting from laser light and makes suitable measurement possible. |
