MASK CASE, CONVEYANCE APPARATUS, EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a mask case for surely conveying a mask having heavy weight.SOLUTION: A mask case C1, which holds a mask provided with a pattern, includes: a storage part body 30 which forms a storage part for storing the mask; a first window which is provided in the storage part body 30 and through which light from the outside of the storage part body 30 is made incident on the inside of the storage part body 30; and a second window which is provided in the storage part body 30 and through which the light incident on the inside of the storage part body 30 is emitted to the outside of the storage part body 30.