RESONATOR WITH A STAGGERED ELECTRODE CONFIGURATION

摘要

An integrated circuit device includes a piezoelectric substrate having a first surface and a second surface opposite the first surface. The device also includes a first electrode and a second electrode on the first surface of the piezoelectric substrate, the first electrode having a first width and the second electrode having a second width. The device further includes a third electrode and a fourth electrode on the second surface of the piezoelectric substrate, the third electrode having a third width that is substantially the same as the second width, and the fourth electrode having a fourth width that is substantially the same as the first width. The first and third electrodes operate as part of a first portion of a microelectromechanical systems (MEMS) resonator, and the second and fourth electrodes operate as part of a second portion of the MEMS resonator.

主权项

1. An integrated circuit device, comprising:
a piezoelectric substrate having a first surface and a second surface opposite the first surface; a first electrode and a second electrode on the first surface of the piezoelectric substrate, the first electrode having a first width and the second electrode having a second width different from the first width; and a third electrode and a fourth electrode on the second surface of the piezoelectric substrate, the third electrode having a third width that is substantially the same as the second width, the fourth electrode having a fourth width that is substantially the same as the first width, the first electrode and the third electrode being arranged to operate as a first portion of a microelectromechanical systems (MEMS) resonator, and the second electrode and the fourth electrode being arranged to operate as a second portion of the MEMS resonator.