MEASURING PROBE FOR NON-DESTRUCTIVE MEASURING OF THE THICKNESS OF THIN LAYERS

摘要

Measuring probe for non-destructive measuring of the thickness of thin layers, in particular in cavities, which are accessible by an opening or on curved surfaces, with a measuring head, which includes at least one sensor element and at least one contact spherical cap, assigned to the sensor element on a surface, to be checked, of the cavity, and with a gripping element for positioning and guiding the measuring probe on and/or along the surface to be measured, wherein on the gripping element, a long, elastically yielding guide bar is provided, which accepts the at least one measuring head on its end opposing the gripping element, in such a way that it is moveable with at least one degree of freedom in relation to the guide bar.

主权项

1. Measuring probe for non-destructive measuring of the thickness of thin layers, in particular in cavities, which are accessible by an opening or on curved surfaces, the measuring probe comprising:
a measuring head, the measuring head comprising at least one sensor element and at least one contact spherical cap assigned to the sensor element on a surface to be checked of the cavity, a gripping element for positioning and guiding the measuring probe on and/or along the surface to be measured, and a long, elastically yielding guide bar, the long, elastically yielding guide bar being provided on the gripping element, the long elastically yielding guide bar having a curved centerline and being deflectable relative to its longitudinal axis, the long, elastically yielding guide bar accepting the at least one measuring head on its end opposing the gripping element in such a way that it is moveable with at least one degree of freedom in relation to the guide bar.