SILICON SOLAR CELL, OPTICAL ANTIREFLECTION FILM OF THE SAME, AND MANUFACTURING METHOD OF OPTICAL ANTIREFLECTION FILM BY NON-VACUUM PROCESS

摘要

PROBLEM TO BE SOLVED: To manufacture an optical antireflection film of a silicon solar cell at low cost.SOLUTION: The optical antireflection film comprises: a dense metal oxide film 2 having a refractive index lower than silicon, formed on a light incident surface of a silicon solar cell substrate, and arranged on a silicon substrate 1, by a non-vacuum process; and a composite film 6 formed on the metal oxide film 2, and including metal oxide nanoparticles 3 having a refractive index lower than a metal oxide composing the metal oxide film and an organic polymer 4 having a refractive index further lower than the oxide nanoparticles by the non-vacuum process.